Scaling Characteristics of Plasma Parameters for Low-Pressure Oxygen RF discharge Plasmas
- Title
- Scaling Characteristics of Plasma Parameters for Low-Pressure Oxygen RF discharge Plasmas
- Author
- 김곤호
- Keywords
- Low-pressure oxygen RF discharge; negative-ion density; scaling formula
- Issue Date
- 2001-07
- Publisher
- IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
- Citation
- IEEE TRANSACTIONS ON PLASMA SCIENCE, v. 29, issue. 6, page. 970-973
- Abstract
- For a low-pressure (1-100 mtorr) oxygen RF discharge plasma, the scaling laws for the densities of charged species such as positive ion, negative ion, and electron are estimated in terms of external and internal plasma parameters for the ion-flux-loss-dominated region based on the global balance equations. The scaling formulas are compared with Langmuir probe measurement results performed on a planar inductively coupled oxygen plasma. The transition point from the ion-flux-loss-dominated region to the recombination-loss-dominated region moves to a lower pressure region as the absorbed power increases.
- URI
- https://ieeexplore.ieee.org/document/974987?arnumber=974987&SID=EBSCO:edseeehttps://repository.hanyang.ac.kr/handle/20.500.11754/160351
- ISSN
- 0093-3813
- DOI
- 10.1109/27.974987
- Appears in Collections:
- COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학) > ETC
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