Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 정재경 | - |
dc.date.accessioned | 2021-03-09T05:33:24Z | - |
dc.date.available | 2021-03-09T05:33:24Z | - |
dc.date.issued | 2019-05 | - |
dc.identifier.citation | SID Symposium Digest of Technical Papers, v. 50, no. 1, page. 1237-1240 | en_US |
dc.identifier.issn | 0097-966X | - |
dc.identifier.uri | https://onlinelibrary.wiley.com/doi/abs/10.1002/sdtp.13156 | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/160292 | - |
dc.description.abstract | We reported the fabrication of amorphous or crystalline IGZO thin film transistors using atomic layer deposition (ALD) method. To observe the crystallinity effect of thin films which are used as a semiconductor channels for TFTs, we tried to deposit crystalline‐IGZO thin films with improving preferred orientation. In this paper, we formed IGZO thin film showing highly‐oriented crystalline properties by insertion seed layer underneath a IGZO thin films. As a result, we could figure out the interrelationship between semiconductor channel crystallinity and electrical performance of devices. | en_US |
dc.description.sponsorship | This research was supported by the MOTIE (Ministry of Trade, Industry & Energy (project number 10080689) and KSRC (Korea Semiconductor Research Consortium) support program for the development of the future semiconductor device. | en_US |
dc.language.iso | en | en_US |
dc.publisher | Wiley | en_US |
dc.subject | Atomic Layer Deposition (ALD) | en_US |
dc.subject | Indium-Gallium-Zinc-Oxide (IGZO) | en_US |
dc.subject | Crystalline Oxide Thin Film | en_US |
dc.subject | Seed Layer | en_US |
dc.subject | Oxide Thin Film Transistor | en_US |
dc.title | Highly‐Ordered Indium‐Gallium‐Zinc Oxide Thin Film Transistor via Atomic Layer Deposition Process | en_US |
dc.type | Article | en_US |
dc.relation.no | 1 | - |
dc.relation.volume | 50 | - |
dc.identifier.doi | 10.1002/sdtp.13156 | - |
dc.relation.page | 1237-1240 | - |
dc.contributor.googleauthor | Seul, Hyeonjoo | - |
dc.contributor.googleauthor | Yang, Hyunji | - |
dc.contributor.googleauthor | On, Nuri | - |
dc.contributor.googleauthor | Jeong, Jae Kyeong | - |
dc.sector.campus | S | - |
dc.sector.daehak | COLLEGE OF ENGINEERING[S] | - |
dc.sector.department | DEPARTMENT OF ELECTRONIC ENGINEERING | - |
dc.identifier.pid | jkjeong1 | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.