Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 박진석 | - |
dc.date.accessioned | 2021-03-03T06:32:40Z | - |
dc.date.available | 2021-03-03T06:32:40Z | - |
dc.date.issued | 2001-08 | - |
dc.identifier.citation | IVMC 2001. Proceedings of the 14th International Vacuum Microelectronics Conference (Cat. No.01TH8586), page. 151-152 | en_US |
dc.identifier.isbn | 0-7803-7197-6 | - |
dc.identifier.uri | https://ieeexplore.ieee.org/document/939698?arnumber=939698&SID=EBSCO:edseee | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/160222 | - |
dc.description.abstract | A novel process to develop field emitter arrays (FEAs) with sub-micron gate holes for highfrequency (GHz) operation of FEA-based microtriode amplifiers is proposed. The formation of amorphous silicon(a-Si) sidewall may be the key technology used to obtain the emitter structure. Scanning electron microscope (SEM) images, field-emission properties, transconductances, and capacitances of the emitters fabricated are presented. Theoretical considerations on the proposed structure are also discussed. | en_US |
dc.language.iso | en_US | en_US |
dc.publisher | IEEE | en_US |
dc.title | A novel process of achieving sub-micron gate holes for high-frequency operation of field emitter arrays | en_US |
dc.type | Article | en_US |
dc.identifier.doi | 10.1109/IVMC.2001.939698 | - |
dc.relation.journal | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | - |
dc.contributor.googleauthor | Uhm, H.S. | - |
dc.contributor.googleauthor | Lee, J.H. | - |
dc.contributor.googleauthor | Song, Y.H. | - |
dc.contributor.googleauthor | Cho, Y.R. | - |
dc.contributor.googleauthor | Whang, C.S. | - |
dc.contributor.googleauthor | Kim, D.H. | - |
dc.contributor.googleauthor | Cho, K.I. | - |
dc.contributor.googleauthor | Park, C.K. | - |
dc.contributor.googleauthor | Park, J.S. | - |
dc.relation.code | 2009206100 | - |
dc.sector.campus | E | - |
dc.sector.daehak | COLLEGE OF ENGINEERING SCIENCES[E] | - |
dc.sector.department | DIVISION OF ELECTRICAL ENGINEERING | - |
dc.identifier.pid | jinsp | - |
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