Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 박진석 | - |
dc.date.accessioned | 2021-02-17T01:17:28Z | - |
dc.date.available | 2021-02-17T01:17:28Z | - |
dc.date.issued | 2001-11 | - |
dc.identifier.citation | Thin Solid Films, v. 398-399, page. 641-646 | en_US |
dc.identifier.issn | 0040-6090 | - |
dc.identifier.uri | https://www.sciencedirect.com/science/article/pii/S0040609001013323 | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/158487 | - |
dc.description.abstract | Cu-doped ZnO (denoted by ZnO:Cu) films have been prepared by RF magnetron co-sputtering of a ZnO target with some Cu-chips attached. X-Ray diffraction (XRD) spectra of deposited ZnO:Cu films were measured and texture coefficient (TC) values for (002)-orientation were estimated. Optimal ranges of RF powers and substrate temperatures for obtaining high TC values were determined. Effects of Cu-doping conditions (such as Cu-chip sputtering areas and O2/(Ar+O2) mixing ratios) on TC values, electrical resistivities, and relative Cu-compositions of deposited films have been systematically investigated. X-Ray photoelectron spectroscopy (XPS) study suggests that the relative densities of metallic copper (Cu0) atoms and CuO (Cu2+)-phases within deposited films may play an important role in determining their electrical resistivities. Highly resistive (>1010 Ωcm) ZnO films with high TC values (>80%) can be achieved by Cu-doping. Surface acoustic wave (SAW) devices with ZnO:Cu (or ZnO)/interdigital transducer (IDT)/SiO2/Si configuration were also fabricated to estimate the effective electro-mechanical coupling coefficient (keff2) and insertion loss. The devices using Cu-doped ZnO films have higher keff2 and lower insertion loss, compared with those using undoped films. | en_US |
dc.description.sponsorship | This work was supported by Korea Research Foundation Grant (KRF-99-041-E00165) and carried out using the facilities of EM&C in Hanyang University. | en_US |
dc.language.iso | en_US | en_US |
dc.publisher | ELSEVIER SCIENCE SA | en_US |
dc.subject | Cu-doped ZnO | en_US |
dc.subject | RF magnetron sputtering | en_US |
dc.subject | c-axis growth | en_US |
dc.subject | Electrical resistivity | en_US |
dc.subject | Surface acoustic wave | en_US |
dc.subject | Electro-mechanical coupling coefficient | en_US |
dc.subject | Insertion loss | en_US |
dc.title | Characterization of undoped and Cu-doped ZnO films for surface acoustic wave applications | en_US |
dc.type | Article | en_US |
dc.identifier.doi | 10.1016/S0040-6090(01)01332-3 | - |
dc.relation.journal | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | - |
dc.contributor.googleauthor | Lee, Jin-Bock | - |
dc.contributor.googleauthor | Lee, Hye-Jung | - |
dc.contributor.googleauthor | Seo, Soo-Hyung | - |
dc.contributor.googleauthor | Park, Jin-Seok | - |
dc.relation.code | 2012206099 | - |
dc.sector.campus | E | - |
dc.sector.daehak | COLLEGE OF ENGINEERING SCIENCES[E] | - |
dc.sector.department | DIVISION OF ELECTRICAL ENGINEERING | - |
dc.identifier.pid | jinsp | - |
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