Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 안강호 | - |
dc.date.accessioned | 2021-01-25T05:40:28Z | - |
dc.date.available | 2021-01-25T05:40:28Z | - |
dc.date.issued | 2002-08 | - |
dc.identifier.citation | 한국반도체장비학회지, v. 1, no. 1, page. 35-40 | en_US |
dc.identifier.uri | https://scienceon.kisti.re.kr/srch/selectPORSrchArticle.do?cn=JAKO200211923081743 | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/157453 | - |
dc.description.abstract | Understanding of charging properties of a small particle is necessary to control the particle contamination and to improve productivity of the electronic device in the plasma aided semiconductor manufacturing processes. In this study, the effects of both magnetic field and particle size on the charging properties are experimentally investigated in collisional dusty plasmas. The experiments carried out in the system consisted of a monodisperse particle generation system, a DC magnetized plasma generation system and a charge measurement system. The plasma chamber is made of cross-shape Pyrex surrounded by magnetic bucket (composed of 12 permanent magnetic bar) to confine the plasma. DC magnetic field up to 250G are applied to the plasma zone by external magnetic coil. Previous work shows the charging effect clearly increase with increasing the size of the particle and plasma density, as it was expected. | en_US |
dc.description.sponsorship | 이 논문은 두뇌 한국21(Brain Korea 21)사업의 지원을 받아 수행되었습니다. | en_US |
dc.language.iso | ko_KR | en_US |
dc.publisher | 한국반도체장비학회 | en_US |
dc.subject | 플라즈마 | en_US |
dc.subject | 자화된 플라즈마 | en_US |
dc.subject | 단분산입자 | en_US |
dc.subject | 하전 | en_US |
dc.subject | Plasma | en_US |
dc.subject | Magentized plasma | en_US |
dc.subject | DMA | en_US |
dc.subject | Monodisperse particle | en_US |
dc.subject | Charge | en_US |
dc.title | 자화된 플라즈마 내에서의 단분산 입자의 하전량 측정 | en_US |
dc.title.alternative | Measurement of Monodisperse Particle Charging in Unmagnetized and Magnetized Plasmas | en_US |
dc.type | Article | en_US |
dc.relation.journal | 한국반도체장비학회지 | - |
dc.contributor.googleauthor | 한장식 | - |
dc.contributor.googleauthor | 안강호 | - |
dc.contributor.googleauthor | 김곤호 | - |
dc.relation.code | 2012210661 | - |
dc.sector.campus | E | - |
dc.sector.daehak | COLLEGE OF ENGINEERING SCIENCES[E] | - |
dc.sector.department | DEPARTMENT OF MECHANICAL ENGINEERING | - |
dc.identifier.pid | khahn | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.