100nm NIST 표준입자를 이용한 미분형 전기이동도 분석기의 교정 및 불확실도 측정

Abstract

House made differential mobility analyzer(DMA) is calibrated with NIST SRM 1691(300 nm PSL) . Then the particle size and uncertainty for differential mobility analyzer(DMA) using the NIST SRM 1963(100 nm PSL). In result, calibration of prototype DMA is measured using 300 nm NIST SRM 1691, then sheath air flow was corrected 126.67㎤ /s. Corrected sheath air flow is used in uncertainty measurement of prototype DMA. Uncertainty analysis is performed using NIST SRM 1963(100 nm PSL). The experimental result shows that NIST SRM 1963 is measured as 102.17 nm with a type A uncertainty of 0.33 nm.