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dc.contributor.author한창수-
dc.date.accessioned2020-12-18T07:35:21Z-
dc.date.available2020-12-18T07:35:21Z-
dc.date.issued2003-10-
dc.identifier.citation제어로봇시스템학회 2003년도 국제학술대회 논문집, page. 1225-1230en_US
dc.identifier.urihttp://www.dbpia.co.kr/journal/articleDetail?nodeId=NODE02007907?-
dc.identifier.urihttps://repository.hanyang.ac.kr/handle/20.500.11754/156345-
dc.description.abstractIn this study, Real-time estimation and compensation procedure are developed for the laser interferometer. This system is designed with homodyne quadrature-phase detection method using the Laser interferometer. The errors in this system are due to noise, disturbance and undefined model dynamics. DSP(Digital Signal Processor) is applied for real time compensation of these errors. This estimator and compensation is verified with measurement test.en_US
dc.description.sponsorshipThis work has been sponsored by MOCIE(Ministry of Commerce, Industry and Energy) of Korea as a part of the project of "Development of Micro optical and thermofluidic devices with high functionality"en_US
dc.language.isoen_USen_US
dc.publisher제어로봇시스템학회en_US
dc.subjectHomodyne Interferometeren_US
dc.subjectDisplacement measurementen_US
dc.subjectreal-time estimationen_US
dc.subjectcompensatoren_US
dc.titleReal time estimation and compensation of the interferometer in nano scaleen_US
dc.typeArticleen_US
dc.contributor.googleauthorLee, Yong-Woo-
dc.contributor.googleauthorChoi, Hyun-Seok-
dc.contributor.googleauthorPark, Tong-Jin-
dc.contributor.googleauthorHan, Chang-Soo-
dc.contributor.googleauthorChoi, Tae-Hoon-
dc.contributor.googleauthorLee, Nak-Kyu-
dc.contributor.googleauthorLee, Hyoung-Wook-
dc.contributor.googleauthorNa, Kyung-Hwan-
dc.sector.campusE-
dc.sector.daehakCOLLEGE OF ENGINEERING SCIENCES[E]-
dc.sector.departmentDEPARTMENT OF ROBOT ENGINEERING-
dc.identifier.pidcshan-
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COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > ROBOT ENGINEERING(로봇공학과) > Articles
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