Synthesis of non-agglomerated nanoparticles by an electrospray assisted chemical vapor deposition (ES-CVD) method
- Title
- Synthesis of non-agglomerated nanoparticles by an electrospray assisted chemical vapor deposition (ES-CVD) method
- Author
- 안강호
- Keywords
- Chemical vapor deposition (CVD); Electrospray; Nanoparticle; Non-agglomerated particles; Particle charging
- Issue Date
- 2003-07
- Publisher
- Elsevier Ltd
- Citation
- JOURNAL OF AEROSOL SCIENCE, v. 34, issue. 7, page. 869-881
- Abstract
- Non-agglomerated spherical silicon, titanium and zirconium oxide nanoparticles were prepared using anelectrospray assisted chemical vapor deposition (ES-CVD) process. Metal alkoxides in conjunction with anelectrospray method were used to introduce charged precursors into a CVD reactor. The ions are producedduring evaporation o fthe charged droplets, and they probably act as seed nuclei (i.e., ion-induced nucleation)and/or, they are attached to the produced particles. The experimental results were compared with those obtainedusing a conventional evaporation CVD method. The particles generated using the conventional evaporationmethod were agglomerated to a considerable extent irregardless o fthe type o fparticle. Whereas, at the sameconditions, high concentrations o fnon-agglomerated nanoparticles having diameters in the range o f10 –40 nmwere obtained using the ES-CVD method. This appears to be due to the charging e:ects o fthe generatedparticles, that is, the electrostatic dispersion o funipolarly charged particles. The size o fthe non-agglomeratedparticles in the ES-CVD method was reduced as the results o fthe decease in the concentration o fprecursorsintroduced by electrospray.
- URI
- https://www.sciencedirect.com/science/article/pii/S0021850203000533https://repository.hanyang.ac.kr/handle/20.500.11754/156108
- ISSN
- 0021-8502
- DOI
- 10.1016/S0021-8502(03)00053-3
- Appears in Collections:
- COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MECHANICAL ENGINEERING(기계공학과) > Articles
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