Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 박진석 | - |
dc.date.accessioned | 2020-11-27T07:48:59Z | - |
dc.date.available | 2020-11-27T07:48:59Z | - |
dc.date.issued | 2003-07 | - |
dc.identifier.citation | 대한전기학회 학술대회 논문집, v. 2003, no. 7, page. 1571-1573 | en_US |
dc.identifier.uri | http://www.dbpia.co.kr/journal/articleDetail?nodeId=NODE01338753? | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/156036 | - |
dc.description.abstract | Diamond films including nanocystalline and graphite phase are grown by microwave plasma chemical vapor deposition using N2 additives and negative substrate bias at growth step. The microstructure of the films is controlled by changing N: gas ratio and negative bias. Defects and grain boundaries between diamond and graphite are proposed to be crucial factors for forming the conducting path of electron emissions. The effect of growth parameters on the film microstructure are investigated by Raman spectroscopy and scanning electron microscopy(SEM). Electron emission characteristics are also examined in terms of the film growth conditions. | en_US |
dc.language.iso | ko_KR | en_US |
dc.publisher | 대한전기학회 | en_US |
dc.title | 증착변수 및 첨가가스에 따른 다이아몬드 박막의 구조적 물성 및 전계 방출 특성의 변화 분석 | en_US |
dc.title.alternative | Characterization of structural and field-emissive properties of diamond films in terms of growth conditions and additive gases | en_US |
dc.type | Article | en_US |
dc.contributor.googleauthor | 박재현 | - |
dc.contributor.googleauthor | 이태훈 | - |
dc.contributor.googleauthor | 박창균 | - |
dc.contributor.googleauthor | 서수형 | - |
dc.contributor.googleauthor | 박진석 | - |
dc.sector.campus | E | - |
dc.sector.daehak | COLLEGE OF ENGINEERING SCIENCES[E] | - |
dc.sector.department | DIVISION OF ELECTRICAL ENGINEERING | - |
dc.identifier.pid | jinsp | - |
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