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dc.contributor.author이창희-
dc.date.accessioned2020-09-09T05:07:21Z-
dc.date.available2020-09-09T05:07:21Z-
dc.date.issued2019-09-
dc.identifier.citationSURFACE & COATINGS TECHNOLOGY, v. 374, Page. 493-499en_US
dc.identifier.issn0257-8972-
dc.identifier.urihttps://www.sciencedirect.com/science/article/pii/S0257897219305390?via%3Dihub-
dc.identifier.urihttps://repository.hanyang.ac.kr/handle/20.500.11754/153687-
dc.description.abstractIn this work, the importance of inter-crystallite bonding in plasma resistant Y2O3 coating deposited by vacuum kinetic spray (VKS) was studied. The inter-crystallite bonding in VKS induced by room temperature consolidation (RTIC) was comparatively analyzed in different coatings using surface hardness data and plasma erosion resistance of the coatings was evaluated using inductively coupled plasma (ICP) etching tests. By a simple heat-treatment of the feedstock powder, a dense and stable Y2O3 coating can be readily achieved. The microstructural features of this coating showed the dense structure of feedstock particles promoted the RTIC process during VKS. It is elucidated that there existed a strong positive linear relationship between hardness and plasma erosion resistance of the Y2O3 coating. The intimate inter-crystallite bonding, which was evaluated by surface hardness, contributed to the significant improvement of plasma erosion resistance of the Y2O3 coating. Through the relationship, which is suggested in this study, the link between feedstock particle microstructure, coating microstructure, mechanical properties, and plasma erosion resistance can be consistently understood.en_US
dc.description.sponsorshipThis work was supported by the World Class 300 Project R&D Support project (www.worldclass300.or.kr) funded by the Small and Medium Business Administration (SMBA, Korea) [Project Name: Development of Plasma-resistant Surface Treatment Technology for 3D-structure and Large-area Parts of Semiconductor/Display Fabrication Equipment].en_US
dc.language.isoenen_US
dc.publisherELSEVIER SCIENCE SAen_US
dc.subjectVacuum kinetic spraying (VKS)en_US
dc.subjectCeramic coatingen_US
dc.subjectHeat-treatmenten_US
dc.subjectMechanical propertiesen_US
dc.subjectPlasma erosion resistanceen_US
dc.titleThe importance of intimate inter-crystallite bonding for the plasma erosion resistance of vacuum kinetic sprayed Y2O3 coatingen_US
dc.typeArticleen_US
dc.relation.no25-
dc.relation.volume374-
dc.identifier.doi10.1016/j.surfcoat.2019.05.052-
dc.relation.page493-499-
dc.relation.journalSURFACE & COATINGS TECHNOLOGY-
dc.contributor.googleauthorKwon, Hansol-
dc.contributor.googleauthorKim, Yeonju-
dc.contributor.googleauthorPark, Hyungkwon-
dc.contributor.googleauthorLee, Changhee-
dc.relation.code2019001758-
dc.sector.campusS-
dc.sector.daehakCOLLEGE OF ENGINEERING[S]-
dc.sector.departmentDIVISION OF MATERIALS SCIENCE AND ENGINEERING-
dc.identifier.pidchlee-
dc.identifier.orcidhttps://orcid.org/0000-0002-1775-3020-
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > MATERIALS SCIENCE AND ENGINEERING(신소재공학부) > Articles
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