Development of 3 DOF Parallel Type of Ultra Precision Manipulator

Abstract

This paper describes the development of 3 DOF Parallel type of ultra precision Manipulator (3 DOF PTUPM) for high precision positioning. In order to find the design parameters of 3 DOF PTUPM, the forward and inverse kinematic analyses and design optimization process are done. The workspace of the end-effector can be found. The 3 DOF PTUPM consists of the piezoelectric actuator, amplifier mechanism with flexure hinge. The piezoelectric actuator has advantages such as high resolution, good response and large maximum force. It has disadvantage such as small motion range. Therefore amplifier mechanism is designed to extend the motion range of piezoelectric actuator by using shape optimization. The mechanical advantage of amplifier mechanism is 6.67 by FEM and 5.54 by experiment. The design process is verified through the comparison with the results of experiments.