다공성 실리콘 내부의 3차원 탄소나노튜브 배열을 통한 기체 검출 소자

Abstract

Gas sensor is a necessary and useful instrument for using various fields of industry or our real life. Here we report new type of gas sensor operated by ionization potential energy, which served as low power consumption device with low breakdown voltage and showed good sensitivity, selectivity and reversibility. Ionization potential gas sensor takes advantage of every gases’distinctive ionization energy as fingerprint region. Fundamentally, it differs from absorption/desorption type of traditional gas sensor, which usually measure resistance of the device. However, ionization gas sensor does not require to put thermal energy in for absorption of gases on the device. Also, it does not demand time for desorption process because of its good reversibility. Due to the fact that ionization potential gas sensor has a lot of advantages such as good sensitivity, selectivity and reversibility, various group have concentrated more on the research about ionization potential gas sensor. 3-dimensional SWNT network inside porous silicon is a unique and practical structure to show good electrical properties. It is expected to display great field emission properties and especially play a important role in lowering power consumption as ionization potential gas sensor.