PZT를 이용한 초정밀 구동의 문헌적 고찰

Abstract

Recently High precision positioning device is used in many kinds of manufacturing and scientific insruments. Piezoelectric tranduser is applied to the positioning devive as actuator. PZT has a high resolution, however, moving range is short. Many researcher have developed the mechanism for increasing a motion range. The types of increasing motion range mechanism with PZT are inertial slider, friction driver, ultrasonic motor, etc. In this paper we discuss the review of the high precision actuctor mechanism with PZT. Many kinds of mechanism for high precision are shown and compared.