Hybrid Task를 위한 유연힌지 기반의 매니퓰레이터 설계

Abstract

로봇공학의 매니퓰레이터(robotic manipulator) 연구에 있어서의 Hybrid Task 즉, 마크로 모션(macro motion)과 마이크로 모션(micro motion)을 동시에 구현하고자 하는 노력은 산업적 필요성과 함께 오랫동안 다루어졌던 주제이다. 그리고 이러한 상충된 두 가지 모션을 함께 구현해야 하는 Hybrid Task 을 필요로 하는 산업적, 기술적 요구와 형태도 다양하게 변해 왔다. 초기에는 산업용 직렬로봇 끝단(end-effector)에 정밀한 병열 메커니즘을 두어 Hybrid Task를 할 수 있는 연구가 주였으나, 최근 들어 반도체와 디스플레이로 대표되는 IT 분야의 고도화에 따른 고 직접화와 대형화되고, 의료/바이오 및 나노 기술 연구의 발달에 따라 미세구조물(micro/nano structure)을 만드는 미세 구조물 제조(macro/nano-manufacturing)가 주목을 받으면서, 필요로 하는 Hybrid Task의 형태도 변화하였다. 본 논문에서는 로봇공학에서 기존의 마이크로/나노 매니퓰레이터 연구들을 Hybrid Task 라는 관점에서 다시 조명해 보고, 최근의 산업적 이슈인 미세 구조물 제조(micro/nano-manufacturing)측면에서 다양하게 응용할 수 있도록 Hybrid Task를 평면상의 넓은 접근(wide-accessing)과 미세 위치결정(micro/nano-positioning)이라는 두 가지 관점에서 새롭게 접근하였다. 필요로 하는 Hybrid Task의 형태와 설계인자(design parameter)를 찾고, 이를 만족할 수 있는 두 가지의 메커니즘 설계 개념, 즉 컴플라이언트 트윈 서보 메커니즘(compliant twin-servo mechanism) 과 3-와이어-링크 병렬 메커니즘(3-wire-linked parallel mechanism)이라는 새로운 메커니즘 개념을 제시하였다. 제안한 유연힌지 기반의 메커니즘(flexure-based manipulator)의 설계를 위해 수학적 모델과 FEM 해석을 수행하였다. 이를 통해 평면의 넓은 작업공간(wide-accessing)과 미세위치결정(nano-positioning)이 동시에 가능한 유연힌지 기반의 매니퓰레이터(flexure-based manipulator)를 설계하였다. 상호 보완적인 두 메커니즘을 통해 6자유도를 가지며 Hybrid Task를 할 수 있는 유연힌지 기반의 매니퓰레이터(flexure-based manipulator)를 설계 및 구현하였다. 그리고 실험을 통해 각 메커니즘의 효용성을 검증하고, 분해능 및 작동범위를 확인하여 미세위치결정(nano-positioning)과 넓은 평면의 작업공간(wide-accessing)을 동시에 구현하는 Hybrid Task가 가능함을 보여 설계된 유연힌지 기반의 매니퓰레이터의 효용성과 가능성을 보였다. 본 논문은 미세위치결정에 중점을 둔 대부분의 기존 연구들과는 달리 상대적으로 넓은 평면 작업공간의 접근과 미세위치결정이 동시에 가능한, 즉 정의된 Hybrid Task가 가능한 유연힌지 기반의 매니퓰레이터에 대한 것이라는 점에서 차별성이 있다. 또한 Hybrid Task 구현을 위해 새로운 구조의 두 개의 메커니즘을 고안하고 제안하였다. 본 연구를 통하여 최근 산업적 필요성이 증가하고 있는 미소구조물(micro/nano structure)을 다루고 생산하는 미세구조물 제조 분야에서 그 생산성 향상과 더 확대된 연구에 기여 할 수 있는 매니퓰레이션 시스템(manipulation system) 구현에 기여하고자 한다.|As to the manipulator research of the robotics, the effort for at the same time implementing the macro motion and micro motion is the theme handled along with the industrial necessity for a long time. The industrial and engineering requirements and form requiring the hybrid task which has to implement this contradicting two kinds motion together had been changing variously. In the first stage, the research that it put the detailed side by side mechanism at the industrial serial robot end and it can do the hybrid task was the main part. But it became bigger with the high direct according to the acceleration of the IT area which recently is represented by the semi-conductor and display. While the micro/nano-manufacturing making the micro/nano structure according to the development of the bio/medical treatment and nanotechnology research, the form of the required hybrid task was changed. In this paper, from the viewpoint of the wide-accessing and nano-positioning, the hybrid task was defined in order to apply in the micro/nano-manufacturing variously. The flexure-based manipulator which can be satisfied this was designed and proposed. Two kinds of mechanisms were devised for the flexure-based manipulator. One is the compliant twin-servo mechanism for wide-accessing and planar nano-positioning. Another one is the wire-linked parallel mechanism for the spatial nano-positioning. The modeling of the compliant twin-servo Mechanism and interpretation was performed. By using the obtained mathematics modeling and FEM, the flexure hinge mechanism was designed. The wire-linked parallel mechanism applied the high elastic wire with the flexure hinge and designed the spatial parallel mechanism of 3 D.O.Fs. Relatively the compliant twin-servo mechanism implemented the nano resolution in the wide planar workspace. The wire-linked parallel mechanism supplements the degree of freedom which is insufficient for the compliant twin-servo mechanism. Even when having the X-Y workspace of the large-scale stroke, relatively the devised compliant twin-servo mechanism supplemented the degree of freedom which is insufficient for the wire-linked parallel mechanism. It implemented the nano resolution in the planar large-scale workspace relatively. The flexure-based manipulator which can do wide-assessing through the complementary two mechanisms even when the nano-positioning this of 6 degree of freedoms was possible was designed. This was implemented. The utility of each mechanism was verified through the experiment. The possibility of the flexure hinge-based manipulator which displayed and that hybrid task which checked the resolution and operation range and which at the same time the wide-accessing wide of the nano-positioning and plane implements was possible is designed and utility was displayed. As to this paper, there is the differentiation in that it is the thing about the manipulator of the flexure hinge base in which the defined hybrid task in which at the same time the access of the relatively wide plane work space and micro position determination is possible unlike most of existing researches laying emphasis on the micro position determination is possible. In addition, new two mechanisms of the structure were devised for the hybrid task implementation. It is put through this research and it tries to contribute to the manipulation system implementation contributing to the research that it is more expanded in the microstructure manufacturing field which handles the micro/nano structure that recently the industrial necessity increases and which it produces with this improvement of productivity.; As to the manipulator research of the robotics, the effort for at the same time implementing the macro motion and micro motion is the theme handled along with the industrial necessity for a long time. The industrial and engineering requirements and form requiring the hybrid task which has to implement this contradicting two kinds motion together had been changing variously. In the first stage, the research that it put the detailed side by side mechanism at the industrial serial robot end and it can do the hybrid task was the main part. But it became bigger with the high direct according to the acceleration of the IT area which recently is represented by the semi-conductor and display. While the micro/nano-manufacturing making the micro/nano structure according to the development of the bio/medical treatment and nanotechnology research, the form of the required hybrid task was changed. In this paper, from the viewpoint of the wide-accessing and nano-positioning, the hybrid task was defined in order to apply in the micro/nano-manufacturing variously. The flexure-based manipulator which can be satisfied this was designed and proposed. Two kinds of mechanisms were devised for the flexure-based manipulator. One is the compliant twin-servo mechanism for wide-accessing and planar nano-positioning. Another one is the wire-linked parallel mechanism for the spatial nano-positioning. The modeling of the compliant twin-servo Mechanism and interpretation was performed. By using the obtained mathematics modeling and FEM, the flexure hinge mechanism was designed. The wire-linked parallel mechanism applied the high elastic wire with the flexure hinge and designed the spatial parallel mechanism of 3 D.O.Fs. Relatively the compliant twin-servo mechanism implemented the nano resolution in the wide planar workspace. The wire-linked parallel mechanism supplements the degree of freedom which is insufficient for the compliant twin-servo mechanism. Even when having the X-Y workspace of the large-scale stroke, relatively the devised compliant twin-servo mechanism supplemented the degree of freedom which is insufficient for the wire-linked parallel mechanism. It implemented the nano resolution in the planar large-scale workspace relatively. The flexure-based manipulator which can do wide-assessing through the complementary two mechanisms even when the nano-positioning this of 6 degree of freedoms was possible was designed. This was implemented. The utility of each mechanism was verified through the experiment. The possibility of the flexure hinge-based manipulator which displayed and that hybrid task which checked the resolution and operation range and which at the same time the wide-accessing wide of the nano-positioning and plane implements was possible is designed and utility was displayed. As to this paper, there is the differentiation in that it is the thing about the manipulator of the flexure hinge base in which the defined hybrid task in which at the same time the access of the relatively wide plane work space and micro position determination is possible unlike most of existing researches laying emphasis on the micro position determination is possible. In addition, new two mechanisms of the structure were devised for the hybrid task implementation. It is put through this research and it tries to contribute to the manipulation system implementation contributing to the research that it is more expanded in the microstructure manufacturing field which handles the micro/nano structure that recently the industrial necessity increases and which it produces with this improvement of productivity.