Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 좌용호 | - |
dc.date.accessioned | 2020-03-09T07:22:52Z | - |
dc.date.available | 2020-03-09T07:22:52Z | - |
dc.date.issued | 2004-03 | - |
dc.identifier.citation | MATERIALS SCIENCE AND ENGINEERING: B, v. 107, No. 3, Page. 289-294 | en_US |
dc.identifier.issn | 0921-5107 | - |
dc.identifier.uri | https://www.sciencedirect.com/science/article/pii/S0921510704000030?via%3Dihub#! | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/134692 | - |
dc.description.abstract | Titanium dioxide (TiO2) thin film was synthesized on α-Al2O3 (0 0 0 1) substrate by liquid sprayed mist chemical vapor deposition under 1 atm. Tetraethylorthotitanate [TEOT, (C2H5O)4Ti] was used as starting material. The liquid source to synthesize TiO2 thin film was prepared from dissolving the starting materials in 2-methoxyethanol. The TiO2 thin film was obtained as the amorphous phase at 300 °C and crystalline anatase type TiO2 above 400 °C. The crystal of thin film was mainly oriented to (1 1 2) plane. The degree of (1 1 2) orientation, the thickness, and the surface roughness of the film were strongly dependent on the substrate temperature and deposition time. By the controlling the substrate temperature and deposition time, TiO2/α-Al2O3 (0 0 0 1) films with preferred orientation were successfully fabricated, and the film deposition rate was about 10 nm/min. | en_US |
dc.description.sponsorship | This work was supported by grant No. 986-0300-005-2 from the Korean Science and Engineering Foundation. | en_US |
dc.language.iso | en_US | en_US |
dc.publisher | Elsevier B.V. | en_US |
dc.subject | Synthesis of TiO2 thin film | en_US |
dc.subject | Ultrasonic atomizer | en_US |
dc.subject | Liquid sprayed mist CVD | en_US |
dc.subject | 1 atmosphere | en_US |
dc.title | Preparation of TiO2 thin film by liquid sprayed mist CVD method | en_US |
dc.type | Article | en_US |
dc.identifier.doi | 10.1016/j.mseb.2003.12.010 | - |
dc.relation.journal | MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED | - |
dc.contributor.googleauthor | Kim, Bok-Hee | - |
dc.contributor.googleauthor | Lee, Jo-Young | - |
dc.contributor.googleauthor | Choa, Yong-Ho | - |
dc.contributor.googleauthor | Higuchi, M | - |
dc.contributor.googleauthor | Mizutani, N | - |
dc.relation.code | 2012206493 | - |
dc.sector.campus | E | - |
dc.sector.daehak | COLLEGE OF ENGINEERING SCIENCES[E] | - |
dc.sector.department | DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING | - |
dc.identifier.pid | choa15 | - |
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