Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 오제훈 | - |
dc.date.accessioned | 2020-01-16T05:49:01Z | - |
dc.date.available | 2020-01-16T05:49:01Z | - |
dc.date.issued | 2019-07 | - |
dc.identifier.citation | MICROELECTRONIC ENGINEERING, v. 215, Article no. 111002 | en_US |
dc.identifier.issn | 0167-9317 | - |
dc.identifier.issn | 1873-5568 | - |
dc.identifier.uri | https://www.sciencedirect.com/science/article/pii/S0167931719301534 | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/121906 | - |
dc.description.abstract | This work aims to present a flexible, highly sensitive, capacitive pressure sensor based on an elastomeric dielectric layer with uniformly distributed micro-pores. The porous dielectric layer was simply produced by microwave treatment of polydimethylsiloxane (PDMS) mixed with a sacrificial solvent within a few minutes. The pressure sensor using a porous PDMS dielectric layer fabricated with 40 wt% sacrificial solvent had a sensitivity of 0.813 kPa(-1), which is 11 times higher than that of the sensor using a non-porous dielectric layer. To further improve the sensitivity, low-cost commercial glass was used as a mold to form microstructures on the surface of the porous dielectric layer. Due to the enhanced deformability, high sensitivity of 1.43 kPa(-1) and a fast response time of 70 ms was achieved. The performances of a sensor array as well as finger sensors were also demonstrated by placing light-weight objects on the array and holding a plastic cup. It would be expected that the proposed sensors could be utilized in the application of artificial skins or soft robotics. | en_US |
dc.description.sponsorship | This work was supported by the National Research Foundation of Korea (NRF) grant funded by the Korea Government (MSIP) (No. 2019R1A2C1005023). This work was also partly supported by the Korea Institute of Energy Technology Evaluation and Planning (KETEP) granted from the Ministry of Trade, Industry and Energy (No. 20194010201740). | en_US |
dc.language.iso | en_US | en_US |
dc.publisher | ELSEVIER SCIENCE BV | en_US |
dc.subject | Pressure sensor | en_US |
dc.subject | Porous structures | en_US |
dc.subject | Microwave treatment | en_US |
dc.subject | Polydimethylsiloxane (PDMS) | en_US |
dc.subject | Surface microstructure | en_US |
dc.subject | Capacitance | en_US |
dc.title | Fabrication of highly sensitive capacitive pressure sensors with porous PDMS dielectric layer via microwave treatment | en_US |
dc.type | Article | en_US |
dc.relation.volume | 215 | - |
dc.identifier.doi | 10.1016/j.mee.2019.111002 | - |
dc.relation.page | 111002-111002 | - |
dc.relation.journal | MICROELECTRONIC ENGINEERING | - |
dc.contributor.googleauthor | Kim, Yeongjun | - |
dc.contributor.googleauthor | Jang, Shin | - |
dc.contributor.googleauthor | Oh, Je Hoon | - |
dc.relation.code | 2019002909 | - |
dc.sector.campus | E | - |
dc.sector.daehak | COLLEGE OF ENGINEERING SCIENCES[E] | - |
dc.sector.department | DEPARTMENT OF MECHANICAL ENGINEERING | - |
dc.identifier.pid | jehoon | - |
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