Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 박진구 | - |
dc.date.accessioned | 2020-01-13T05:09:54Z | - |
dc.date.available | 2020-01-13T05:09:54Z | - |
dc.date.issued | 2019-05 | - |
dc.identifier.citation | ELECTRONIC MATERIALS LETTERS, v. 15, No. 3, Page. 357-362 | en_US |
dc.identifier.issn | 1738-8090 | - |
dc.identifier.issn | 2093-6788 | - |
dc.identifier.uri | https://link.springer.com/article/10.1007%2Fs13391-019-00123-0 | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/121719 | - |
dc.description.abstract | Pad conditioners are important consumables for semiconductor chemical mechanical planarization processes. Recently, a new concept has been developed to improve the performance and lifetime of a pad conditioner by depositing diamond film on a uniformly patterned substrate. In this study, we investigated the pad conditioner lifetime while varying the crystal size of the deposited diamond film, which was controlled via different methane ( CH4) gas concentrations in hydrogen gas (H2). Microcrystalline diamond (MCD) film was formed using 2% CH4 in H2 flow and nanocrystalline diamond film (NCD) was formed with 4% CH4. The NCD film showed a longer lifetime and higher adhesion with the substrate than the MCD film. | en_US |
dc.description.sponsorship | This research was supported by Ansan-Si hidden champion fostering and supporting project funded by Ansan city. | en_US |
dc.language.iso | en_US | en_US |
dc.publisher | KOREAN INST METALS MATERIALS | en_US |
dc.subject | CMP pad conditioner | en_US |
dc.subject | CVD conditioner | en_US |
dc.subject | Diamond crystal size | en_US |
dc.subject | Raman spectroscopy | en_US |
dc.subject | Conditioner lifetime | en_US |
dc.title | Selection of CVD Diamond Crystal Size on a CVD Pad Conditioner for Improved Lifetime | en_US |
dc.type | Article | en_US |
dc.relation.no | 3 | - |
dc.relation.volume | 15 | - |
dc.identifier.doi | 10.1007/s13391-019-00123-0 | - |
dc.relation.page | 357-362 | - |
dc.relation.journal | ELECTRONIC MATERIALS LETTERS | - |
dc.contributor.googleauthor | Ryu, Heon-Yul | - |
dc.contributor.googleauthor | Kim, Ji-Woo | - |
dc.contributor.googleauthor | Hyun, Da-Bin | - |
dc.contributor.googleauthor | Kim, Yeo-Ho | - |
dc.contributor.googleauthor | Lee, Jung-Hwan | - |
dc.contributor.googleauthor | Park, Jin-Goo | - |
dc.relation.code | 2019042122 | - |
dc.sector.campus | E | - |
dc.sector.daehak | COLLEGE OF ENGINEERING SCIENCES[E] | - |
dc.sector.department | DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING | - |
dc.identifier.pid | jgpark | - |
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