Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 박진성 | - |
dc.date.accessioned | 2019-11-25T04:17:50Z | - |
dc.date.available | 2019-11-25T04:17:50Z | - |
dc.date.issued | 2017-09 | - |
dc.identifier.citation | CERAMICS INTERNATIONAL, v. 43, no. 13, page. 10628-10631 | en_US |
dc.identifier.issn | 0272-8842 | - |
dc.identifier.issn | 1873-3956 | - |
dc.identifier.uri | https://www.sciencedirect.com/science/article/pii/S0272884217308994?via%3Dihub | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/114047 | - |
dc.description.abstract | Silicon oxide films were deposited by high-worldng-pressure plasma-enhanced chemical vapor deposition using hexamethyldisiloxane and O-2/He plasma as the precursor and the reactant, respectively. As the O-2 flow rate increased during the process, the plasma density of O-2 and He decreased due to reduction in the partial pressure of He, which affected the composition of O/Si in the silicon oxide films. Consequently, we found out that the compositional ratio of SiO2/SiO could be modulated by O-2 flow conditions during the high-working-pressure plasma-enhanced chemical vapor deposition process. Additionally, it was observed that the water vapor transmission rate reduced with an increase in the O-2 flow rate because of a compositional change in the silicon oxide films. | en_US |
dc.description.sponsorship | This research was supported by the MOTIE (Ministry of Trade, Industry & Energy (project number #10052027)) and KDRC (Korea Display Research Corporation) and also was done by National Research Foundation of Korea (NRF) grant funded by the Korea government(MSIP) (No. 2016R1C1B2007336) and by the Energy Technology development Program of the Korea Institute of Energy Technology Evaluation and Planning (KETEP) grant (20163010012560, 20172010104940). | en_US |
dc.language.iso | en_US | en_US |
dc.publisher | ELSEVIER SCI LTD | en_US |
dc.subject | Silicon oxide | en_US |
dc.subject | High working pressure plasma-enhanced chemical vapor deposition | en_US |
dc.subject | Thin films | en_US |
dc.subject | Water permeation property | en_US |
dc.title | Silicon oxide film deposited at room temperatures using high-working pressure plasma-enhanced chemical vapor deposition: Effect of O-2 flow rate | en_US |
dc.type | Article | en_US |
dc.relation.no | 13 | - |
dc.relation.volume | 43 | - |
dc.identifier.doi | 10.1016/j.ceramint.2017.05.095 | - |
dc.relation.page | 10628-10631 | - |
dc.relation.journal | CERAMICS INTERNATIONAL | - |
dc.contributor.googleauthor | Lee, Young-Soo | - |
dc.contributor.googleauthor | Lee, SeungHwan | - |
dc.contributor.googleauthor | Kwon, Jung-Dae | - |
dc.contributor.googleauthor | Ahn, Ji-Hoon | - |
dc.contributor.googleauthor | Park, Jin-Seong | - |
dc.relation.code | 2017001945 | - |
dc.sector.campus | S | - |
dc.sector.daehak | COLLEGE OF ENGINEERING[S] | - |
dc.sector.department | DIVISION OF MATERIALS SCIENCE AND ENGINEERING | - |
dc.identifier.pid | jsparklime | - |
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