스핀코팅 공정에서의 자유표면변형을 고려한 액적의 유동해석

Abstract

In this study, the characteristics of droplet flow in the spin coating process considering the free surface evolution has been examined. Spin coating process is governed by the balance between centrifugal force, gravity force and surface tension force. Numerical simulation is performed by using the commercial CFD package. The numerical model is validated by comparing its results with experimental data of the initial droplet radius for the steady state and convective outflow radius in the spin coating process. The effects of the spin speed and the liquid property on the film radius, height and uniformity have been examined by varying the liquid volume. The film radius and uniformity increase with the speed of the spin and decrease with increasing the viscous coefficient for the same spin speed.