Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 이선영 | - |
dc.date.accessioned | 2019-08-05T06:55:17Z | - |
dc.date.available | 2019-08-05T06:55:17Z | - |
dc.date.issued | 2006-06 | - |
dc.identifier.citation | 정보저장시스템학회논문집, v. 2, No. 2, Page. 96-99 | en_US |
dc.identifier.issn | 1738-6845 | - |
dc.identifier.uri | http://kiss.kstudy.com/thesis/thesis-view.asp?key=3065602 | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/108246 | - |
dc.description.abstract | In this research, a wafer-level transfer method of cantilever array on a conventional CMOS circuit has been developed for high density probe-based data stroage. The transferred cantilevers were silicon nitride cantilevers integrated with poly silicon heaters and piezoelectric sensors, called thermo-piezoelectric Si3N4 cantilevers. In this process, we did not use a SOI wafer but a conventional p-type wafer for the fabrication of the thermo-piezoelectric Si3N4 cantilever arrays. Furthermore, we have developed a very simple transfer process, requiring only one step of cantilever transfer process for the integration of the CMOS wafer and cantilevers. Using this process, we have fabricated a single thermo- piezoelectric Si3N4 cantilever, and recorded 65nm data bits on a PMMA film and confirmed a charge signal at 5 nm of cantilever deflection. And we have successfully applied this method to transfer 34 by 34 thermo-piezoelectric SI3N4 cantilever arrays on a CMOS wafer. We obtained reading signals from one of the cantilevers. | en_US |
dc.language.iso | ko_KR | en_US |
dc.publisher | 정보저장시스템학회 | en_US |
dc.subject | Thermo-piezoelectric Si3N4 cantilever | en_US |
dc.subject | PZT | en_US |
dc.subject | probe-based data storage | en_US |
dc.subject | wafer Lever transfer | en_US |
dc.title | 웨이퍼 본딩을 이용한 탐침형 정보 저장장치용 압전 켄틸레버 어레이 | en_US |
dc.title.alternative | Thermo-piezoelectric Si3N4 cantilever array on a CMOS circuit for probe-based data storage using wafer-Lever transfer method | en_US |
dc.type | Article | en_US |
dc.contributor.googleauthor | 김영식 | - |
dc.contributor.googleauthor | 장성수 | - |
dc.contributor.googleauthor | 이선영 | - |
dc.contributor.googleauthor | 진원혁 | - |
dc.contributor.googleauthor | 조일주 | - |
dc.contributor.googleauthor | 남효진 | - |
dc.contributor.googleauthor | 부종욱 | - |
dc.sector.campus | E | - |
dc.sector.daehak | COLLEGE OF ENGINEERING SCIENCES[E] | - |
dc.sector.department | DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING | - |
dc.identifier.pid | sunyonglee | - |
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