Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 이선영 | - |
dc.date.accessioned | 2019-07-25T04:56:47Z | - |
dc.date.available | 2019-07-25T04:56:47Z | - |
dc.date.issued | 2006-04 | - |
dc.identifier.citation | 19th IEEE International Conference on Micro Electro Mechanical Systems, Page. 922-925 | en_US |
dc.identifier.issn | 1084-6999 | - |
dc.identifier.uri | https://ieeexplore.ieee.org/abstract/document/1627951 | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/107845 | - |
dc.description.abstract | In this research, a wafer-level transfer method of cantilever array on a conventional CMOS circuit has been developed for high density probe-based data storage. The transferred cantilevers were silicon nitride (Si3N 4) cantilevers integrated with poly silicon heaters and piezoelectric sensors, called thermo-piezoelectric SisN4 cantilevers. The thermo-piezoelectric Si3N4 cantilever arrays were fabricated with a conventional p-type silicon wafer instead of a SOI wafer. Furthermore, we have developed a wafer-level cantilever transfer process, which requires only one step of cantilever transfer process to integrate the CMOS circuit with the cantilevers. Using this process, we have fabricated a single thermo-piezoelectric Si3N4 cantilever, and recorded 65nm data bits on a PMMA film. And we have successfully applied this method to transfer 34×34 thermo-piezoelectric Si3N4 cantilever arrays on a CMOS wafer. Finally, We obtained reading signals from one of the cantilevers. | en_US |
dc.description.sponsorship | This work is supported by “The program for the Development of the Next Generation Ultra-High Density Storage” of the Ministry of Commerce, Industry and Energy. | en_US |
dc.language.iso | en_US | en_US |
dc.publisher | IEEE | en_US |
dc.title | WAFER-LEVEL TRANSFER OF THERMO-PIEZOELECTRIC Si3N4 CANTILEVER ARRAY ON A CMOS CIRCUIT FOR HIGH DENSITY PROBE-BASED DATA STORAGE | en_US |
dc.type | Article | en_US |
dc.identifier.doi | 10.1109/MEMSYS.2006.1627951 | - |
dc.contributor.googleauthor | Kim, Y.-S. | - |
dc.contributor.googleauthor | Nam, H.-J. | - |
dc.contributor.googleauthor | Jang, S. | - |
dc.contributor.googleauthor | Lee, C.S. | - |
dc.contributor.googleauthor | Jin, W.-H. | - |
dc.contributor.googleauthor | Cho, I.-J. | - |
dc.contributor.googleauthor | Bu, J.-U. | - |
dc.contributor.googleauthor | Chang, S.-I. | - |
dc.contributor.googleauthor | Yoon, E. | - |
dc.sector.campus | E | - |
dc.sector.daehak | COLLEGE OF ENGINEERING SCIENCES[E] | - |
dc.sector.department | DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING | - |
dc.identifier.pid | sunyonglee | - |
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