Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 안강호 | - |
dc.date.accessioned | 2019-05-22T00:14:48Z | - |
dc.date.available | 2019-05-22T00:14:48Z | - |
dc.date.issued | 2008-12 | - |
dc.identifier.citation | 반도체디스플레이기술학회지, v. 7, No. 3, Page. 29-34 | en_US |
dc.identifier.issn | 1738-2270 | - |
dc.identifier.uri | http://www.ndsl.kr/ndsl/search/detail/article/articleSearchResultDetail.do?cn=JAKO200817556469646&SITE=CLICK | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/105236 | - |
dc.description.abstract | This paper describes the fabrication and characterization of a differential pressure type integrated mass-flow controller made of stainless steel for reactive and corrosive gases. The fabricated mass-flow controller is composed of a normally closed valve and differential pressure sensor. A stacked solenoid actuator mounted on a base-block is utilized for precise and rapid control of gas flow. The differential pressure flow sensor consisting of four diaphragms can detect a flow rate by deflection of diaphragm. By a feedback control from the flow sensor to the valve actuator, it is possible to keep the flow rate constant. This device shows a fast response less than 0.3 sec. Also, this device shows accuracy less than 0.1 % of full scale. It is confirmed that this device is not attacked by toxic gas, so the integrated mass-flow controller can be applied to advanced semiconductor processes which need fine mass-flow control corrosive gases with fast response. | en_US |
dc.language.iso | ko_KR | en_US |
dc.publisher | 한국반도체디스플레이기술학회 | en_US |
dc.subject | Accuracy | en_US |
dc.subject | Differential Pressure | en_US |
dc.subject | Linearity | en_US |
dc.subject | MFC (mass flow controller) | en_US |
dc.subject | Response Time | en_US |
dc.subject | Semiconductor | en_US |
dc.subject | Sensor | en_US |
dc.title | 반도체 공정용 차압식 질량 유량 제어 장치의 개발 및 성능 평가 | en_US |
dc.title.alternative | Development and Evaluation of Differential Pressure Type Mass Flow Controller for Semiconductor Fabrication Processing | en_US |
dc.type | Article | en_US |
dc.relation.journal | 반도체및디스플레이장비학회지 | - |
dc.contributor.googleauthor | 안진홍 | - |
dc.contributor.googleauthor | 강기태 | - |
dc.contributor.googleauthor | 안강호 | - |
dc.relation.code | 2012214884 | - |
dc.sector.campus | E | - |
dc.sector.daehak | COLLEGE OF ENGINEERING SCIENCES[E] | - |
dc.sector.department | DEPARTMENT OF MECHANICAL ENGINEERING | - |
dc.identifier.pid | khahn | - |
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