Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 이선영 | - |
dc.date.accessioned | 2018-11-26T05:19:38Z | - |
dc.date.available | 2018-11-26T05:19:39Z | - |
dc.date.issued | 2008-08 | - |
dc.identifier.citation | JAPANESE JOURNAL OF APPLIED PHYSICS, v. 47, No. 8, Page. 6422-6426 | en_US |
dc.identifier.issn | 0021-4922 | - |
dc.identifier.uri | http://iopscience.iop.org/article/10.1143/JJAP.47.6422/meta | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/80634 | - |
dc.description.abstract | Mechanism for fluorinated carbon film formation was investigated by varying pressure and substrate temperature to find the optimum deposition condition anti-stiction layer. The temperature and pressure were varied using design of experiment (DOE) method and C4F8 was used as a source gas in this study. Film was deposited by plasma-enhanced chemical vapor deposition (PECVD), and various properties of these films were measured, such as contact angle, surface energy, and thickness. Moreover, this film was characterized using Fourier transform infrared spectrometry (FTIR). From FTIR analysis, an extra peak at low temperature was detected and it was identified to be CF 2 which was not detected at 250 °C. It was found that more fluorine atoms decomposed at high temperature. Therefore, it was found that the decomposition of fluorine atoms at high temperature resulted the lowest thickness while at two lower temperatures, the strong chemical bond between Carbon and Fluorine atoms resulted thicker films. | en_US |
dc.description.sponsorship | We would like to thank Gyu Chae Kim for his technical supports. This work was supported by the Ministry of Commerce Industry and Energy (MOCIE) project number 10030038 and by the Post BK 21 Program. | en_US |
dc.language.iso | en_US | en_US |
dc.publisher | INST PURE APPLIED PHYSICS | en_US |
dc.subject | octafluorocyclobutane (C4F8) | en_US |
dc.subject | plasma enhanced chemical vapor deposition (PECVD) | en_US |
dc.subject | fluorinated carbon (FC) film | en_US |
dc.subject | Fourier transform infrared spectrometer (FTIR) | en_US |
dc.subject | anti-stiction layer | en_US |
dc.title | Investigation of Surface Layer Formation for Fluorinated Carbon Film Using Fourier Transform Infrared Spectrometry Analysis | en_US |
dc.type | Article | en_US |
dc.identifier.doi | 10.1143/JJAP.47.6422 | - |
dc.relation.journal | JAPANESE JOURNAL OF APPLIED PHYSICS | - |
dc.contributor.googleauthor | Seong, Mi-Ryn | - |
dc.contributor.googleauthor | Lee, Gye-Young | - |
dc.contributor.googleauthor | Cho, Si-Hyeong | - |
dc.contributor.googleauthor | Lim, Hyun-Woo | - |
dc.contributor.googleauthor | Park, Jin-Goo | - |
dc.contributor.googleauthor | Lee, Caroline Sunyong | - |
dc.relation.code | 2011217131 | - |
dc.sector.campus | E | - |
dc.sector.daehak | COLLEGE OF ENGINEERING SCIENCES[E] | - |
dc.sector.department | DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING | - |
dc.identifier.pid | sunyonglee | - |
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