Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 문봉진 | - |
dc.date.accessioned | 2018-11-05T23:48:21Z | - |
dc.date.available | 2018-11-05T23:48:21Z | - |
dc.date.issued | 2008-03 | - |
dc.identifier.citation | APPLIED PHYSICS LETTERS, v. 92, No. 1, Article no. 012110 | en_US |
dc.identifier.issn | 0003-6951 | - |
dc.identifier.uri | https://aip.scitation.org/doi/full/10.1063/1.2830332 | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/80237 | - |
dc.description.abstract | We have applied ambient-pressure x-ray photoelectron spectroscopy with Si 2p chemical shifts to study the real-time dry oxidation of Si(100), using pressures in the range of 0.01-1 Torr and temperatures of 300-530 degrees C, and examining the oxide thickness range from 0 to similar to 25 angstrom. The oxidation rate is initially very high (with rates of up to similar to 225 angstrom/h) and then, after a certain initial thickness of the oxide in the range of 6-22 angstrom is formed, decreases to a slow state (with rates of similar to 1.5-4.0 angstrom/h). Neither the rapid nor the slow regime is explained by the standard Deal-Grove model for Si oxidation. (C) 2008 American Institute of Physics. | en_US |
dc.language.iso | en_US | en_US |
dc.publisher | AMER INST PHYSICS | en_US |
dc.subject | 2P CORE-LEVEL | en_US |
dc.subject | THERMAL-OXIDATION | en_US |
dc.subject | SYNCHROTRON-RADIATION | en_US |
dc.subject | SI(001) SURFACES | en_US |
dc.subject | SILICON | en_US |
dc.subject | GROWTH | en_US |
dc.subject | SI | en_US |
dc.subject | OXIDE | en_US |
dc.subject | DECOMPOSITION | en_US |
dc.title | Real-Time Observation of the Dry Oxidation of the Si(100) Surface with Ambient Pressure X-ray Photoelectron Spectroscopy | en_US |
dc.type | Article | en_US |
dc.identifier.doi | 10.1063/1.2830332 | - |
dc.relation.journal | APPLIED PHYSICS LETTERS | - |
dc.contributor.googleauthor | Enta, Yoshiharu | - |
dc.contributor.googleauthor | Mun, Bongjin S. | - |
dc.contributor.googleauthor | Rossi, Massimiliano | - |
dc.contributor.googleauthor | Ross, Philip N., Jr. | - |
dc.contributor.googleauthor | Hussain, Zahid | - |
dc.contributor.googleauthor | Fadley, Charles S. | - |
dc.contributor.googleauthor | Lee, Ki-Suk | - |
dc.contributor.googleauthor | Kim, Sang-Koog | - |
dc.relation.code | 2008200866 | - |
dc.sector.campus | E | - |
dc.sector.daehak | COLLEGE OF SCIENCE & TECHNOLOGY[E] | - |
dc.sector.department | DIVISION OF SCIENCE & TECHNOLOGY | - |
dc.identifier.pid | bsmun | - |
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