Finite Element Analysis of Nanoindentation of Anatase TiO2 Nanotubes

Abstract

Titanium dioxide (TiO2) nanotube arrays are attracting increasing attention for use in solar cells, lithium-ion batteries, and biomedical implants. To take full advantage of their unique physical properties, such arrays need to maintain adequate mechanical integrity in applications. However, the mechanical performance of TiO2 nanotube arrays is not well understood. In this work, we investigate the deformation of TiO2 nanotube arrays using the finite element analysis to simulate nanoindentation technique. Nanoindentation is used to detect the mechanical response of Young's Modulus and hardness. Progressively higher elastic modulus values were obtained used for thinner film consistent with the increasing effect as the Ti substrate.