Vibration sensitivity analysis of MEMS vibratory ring gyroscopes
- Title
- Vibration sensitivity analysis of MEMS vibratory ring gyroscopes
- Author
- 윤상원
- Keywords
- Vibration sensitivity; Ring gyroscopes; Gyroscope modeling; Lagrange's equations; Translation modes; Flexural modes
- Issue Date
- 2011-11
- Publisher
- Elsevier Science SA
- Citation
- Sensors and Actuators A Physical, 2011, 171(2), P.163-177
- Abstract
- This paper presents a detailed model for possible vibration effects on MEMS degenerate gyroscopes represented by vibratory ring gyroscopes. Ring gyroscopes are believed to be relatively vibration-insensitive because the vibration modes utilized during gyro operation are decoupled from the modes excited by environmental vibration. Our model incorporates four vibration modes needed to describe vibration-induced errors: two flexural modes (for gyro operation) and two translation modes (excited by external vibration). The four-mode dynamical model for ring gyroscopes is derived using Lagrange's equations. The model considers all elements comprising a ring gyroscope, namely the ring structure, the support-spring structures, and the electrodes that surround the ring structure. Inspection of this model demonstrates that the output of a ring gyroscope is fundamentally insensitive to vibration due to the decoupled dynamics governing ring translation versus ring flexure, however, becomes vibration-sensitive in the presence of non-proportional damping and/or capacitive nonlinearity at the sense electrodes.
- URI
- https://www.sciencedirect.com/science/article/pii/S0924424711004754?via%3Dihubhttps://repository.hanyang.ac.kr/handle/20.500.11754/72956
- ISSN
- 0924-4247
- DOI
- 10.1016/j.sna.2011.08.010
- Appears in Collections:
- COLLEGE OF ENGINEERING[S](공과대학) > AUTOMOTIVE ENGINEERING(미래자동차공학과) > Articles
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