Repository at Hanyang UniversityCOLLEGE OF ENGINEERING[S](공과대학)MECHANICAL ENGINEERING(기계공학부)Articles
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정전기력을 고려한 MEMS 가속도계 성능분석
- Title
- 정전기력을 고려한 MEMS 가속도계 성능분석
- Other Titles
- MEMS Accelerometer Performance Analysis Undertaking Electrostatic Force
- Author
- 유홍희
- Issue Date
- 2012-04
- Publisher
- 대한기계학회
- Citation
- 대한기계학회 춘추학술대회, 2012, P.267-268
- URI
- http://www.dbpia.co.kr/Journal/ArticleDetail/NODE02081181https://repository.hanyang.ac.kr/handle/20.500.11754/70966
- Appears in Collections:
- COLLEGE OF ENGINEERING[S](공과대학) > MECHANICAL ENGINEERING(기계공학부) > Articles
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