Repository at Hanyang UniversityCOLLEGE OF ENGINEERING[S](공과대학)MECHANICAL ENGINEERING(기계공학부)Articles
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정전기력을 고려한 MEMS 가속도계 진동해석
- Title
- 정전기력을 고려한 MEMS 가속도계 진동해석
- Other Titles
- Vibration Analysis of MEMS Accelerometer Undertaking Electrostatic Force
- Author
- 유홍희
- Issue Date
- 2012-04
- Publisher
- 한국소음진동공학회
- Citation
- 한국소음진동공학회, 2012, 4, P.755-756
- URI
- http://www.dbpia.co.kr/Journal/ArticleDetail/NODE02457055https://repository.hanyang.ac.kr/handle/20.500.11754/70945
- Appears in Collections:
- COLLEGE OF ENGINEERING[S](공과대학) > MECHANICAL ENGINEERING(기계공학부) > Articles
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