Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 정진욱 | - |
dc.date.accessioned | 2018-04-14T11:10:03Z | - |
dc.date.available | 2018-04-14T11:10:03Z | - |
dc.date.issued | 2011-01 | - |
dc.identifier.citation | Journal of Applied Physics,Vol.109 No.1 [2011],013306 | en_US |
dc.identifier.issn | 0021-8979 | - |
dc.identifier.issn | 1089-7550 | - |
dc.identifier.uri | http://aip.scitation.org/doi/10.1063/1.3530578 | - |
dc.identifier.uri | http://hdl.handle.net/20.500.11754/66197 | - |
dc.description.abstract | Contribution of stepwise ionization to total ionization was experimentally investigated in low-pressure inductively coupled argon plasmas. In the pressure range 3-50 mTorr, optical emission spectroscopy was employed to determine metastable fractions (metastable density relative to ground state density) by measuring the emission intensity of selected lines. The measured metastable fractions were in good agreement with the calculation, showing a dependence on the discharge pressure. The rate of stepwise ionization was estimated from the excited level densities (measurements and model predictions) and their ionization rate coefficients. It is observed that at relatively low discharge pressures (<10 mTorr) the ionization is mainly provided by the direct ionization, whereas at higher pressure the stepwise ionization is predominant with increasing absorbed power. (C) 2011 American Institute of Physics. [doi:10.1063/1.3530578] | en_US |
dc.description.sponsorship | The authors thank M.H. Lee for help in obtaining the results of model calculation and also thank S.Y. Moon for helpful discussions. One of the authors (Y.-K.L) was funded by Seoul Science Scholarship Foundation of Korea. This work was supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) grant funded by MEST (2010-0029418, 2010-0020061) and Technology Innovation Program through NRF grant funded by MKE (2010-10034827). | en_US |
dc.language.iso | en | en_US |
dc.publisher | AMERICAN INSTITUTE OF PHYSICS | en_US |
dc.subject | ENERGY DISTRIBUTION FUNCTION | en_US |
dc.subject | COLLISIONAL-RADIATIVE MODEL | en_US |
dc.subject | ELECTRON-IMPACT EXCITATION | en_US |
dc.subject | CROSS-SECTIONS | en_US |
dc.subject | METASTABLE ATOMS | en_US |
dc.subject | POSITIVE-COLUMN | en_US |
dc.subject | DRIVEN PLASMAS | en_US |
dc.subject | DISCHARGES | en_US |
dc.subject | GAS | en_US |
dc.subject | TEMPERATURE | en_US |
dc.title | Ionization in inductively coupled argon plasmas studied by optical emission spectroscopy | en_US |
dc.type | Article | en_US |
dc.relation.no | 1 | - |
dc.relation.volume | 109 | - |
dc.identifier.doi | 10.1063/1.3530578 | - |
dc.relation.page | 1-1 | - |
dc.relation.journal | JOURNAL OF APPLIED PHYSICS | - |
dc.contributor.googleauthor | Lee, Young-Kwang | - |
dc.contributor.googleauthor | Chung, Chin-Wook | - |
dc.relation.code | 2011204664 | - |
dc.sector.campus | S | - |
dc.sector.daehak | COLLEGE OF ENGINEERING[S] | - |
dc.sector.department | DIVISION OF ELECTRICAL AND BIOMEDICAL ENGINEERING | - |
dc.identifier.pid | joykang | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.