통합 제진 마운트의 상용화 기술개발

Abstract

It is very important to control the vibration transmitted from external utilities and the transient response due to the internal sources for the precision equipment, which is very sensitive to the vibration environment. The anti-vibration tables that use air springs have been widely used due to their excellent isolation performance, but the systems with high flexibility have the critical problem of large transient response by the impulsive force of the moving mass in operation of the equipment. In this paper, the integrated vibration control system is proposed, which is combined the air springs with the MR damper and electro-magnetic actuator in order to satisfy the performances of isolation and vibration reduction simutaneously.