공기스프링을 이용한 다자유도 강체 시스템의 진동 제어

Abstract

The high-precision vibration isolation is the essential technology for the successful development of highintegrated and ultra-precision industries. The air spring is widely used to isolate the vibration of the precision machining/production because of its excellent isolation characteristics in a wide frequency range. However, it is difficult to control the air spring because it has non-linear characteristic. In this study, an active vibration control for the multi-axis rigid body, high-precision manufacturing table, mounted by air springs is performed. To solve the problem of the non-linearity, one of the robust control method, time delay control, is employed.