Repository at Hanyang UniversityCOLLEGE OF ENGINEERING[S](공과대학)ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부)Articles
184
0
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 정진욱 | - |
| dc.date.accessioned | 2018-03-29T07:21:05Z | - |
| dc.date.available | 2018-03-29T07:21:05Z | - |
| dc.date.issued | 2014-01 | - |
| dc.identifier.citation | Thin Solid Films, 2013, 547, Pages 9-12 | en_US |
| dc.identifier.issn | 0040-6090 | - |
| dc.identifier.uri | https://ac.els-cdn.com/S0040609013009589/1-s2.0-S0040609013009589-main.pdf?_tid=spdf-3b6953d8-b394-41e3-8d91-4694a254c82d&acdnat=1519727284_9da4bdf51b2e0f23df3fad1ea312e57d | - |
| dc.identifier.uri | http://hdl.handle.net/20.500.11754/53772 | - |
| dc.description.abstract | A method for measuring a transferred power to plasma is proposed in an inductively coupled plasma. Antenna currents are monitored when the plasma is turned on at a certain input power. The transferred power can be obtained by subtraction of the power at the same current when the plasma is turned off without inert gas, to the input power. This method is compared to the conventional method against various input powers and it is in good agreement. The circuit analysis of an impedance matching network is also discussed in this work. | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | ELSEVIER SCIENCE SA, PO BOX 564, 1001 LAUSANNE, SWITZERLAND | en_US |
| dc.subject | Inductively coupled plasma | en_US |
| dc.subject | Power transfer efficiency | en_US |
| dc.subject | Dissipated power in system | en_US |
| dc.title | Method for the measurement of transferred power to plasma in inductive discharges (vol 547, pg 9, 2013) | en_US |
| dc.type | Article | en_US |
| dc.relation.volume | 551 | - |
| dc.identifier.doi | 10.1016/j.tsf.2013.05.114 | - |
| dc.relation.page | 206-206 | - |
| dc.relation.journal | THIN SOLID FILMS | - |
| dc.contributor.googleauthor | Hwang, Hye-Ju | - |
| dc.contributor.googleauthor | Kim, Young-Cheol | - |
| dc.contributor.googleauthor | Chung, Chin-Wook | - |
| dc.relation.code | 2014040221 | - |
| dc.sector.campus | S | - |
| dc.sector.daehak | COLLEGE OF ENGINEERING[S] | - |
| dc.sector.department | DIVISION OF ELECTRICAL AND BIOMEDICAL ENGINEERING | - |
| dc.identifier.pid | joykang | - |
- Appears in Collections:
- COLLEGE OF ENGINEERING[S](공과대학) > ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부) > Articles
- Files in This Item:
There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.
