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GRADUATE SCHOOL[S](대학원)
BIONANOTECHNOLOGY(바이오나노학과)
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Results 31-40 of 84 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2011-08
Citric Acid and NaIO(4) Based Alkaline Cleaning Solution for Particle Removal during Post-Ru CMP Cleaning
박진구
2014-01
Effect of Silicon Dioxide Hardness on Scratches in Interlevel Dielectric Chemical-Mechanical Polishing
박진구
2014-01
Abrasive and additive interactions in high selectivity STI CMP slurries
박진구
2014-01
Removal of UV-cured resin using a hybrid cleaning process for nanoimprint lithography
박진구
2014-06
Characterization of non-amine-based post-copper chemical mechanical planarization cleaning solution
박진구
2017-03
Impact of non-uniform wrinkles for a multi-stack pellicle in EUV lithography
박진구
2018-04
Conductive and transparent submicron polymer lens array fabrication for electrowetting applications
박진구
2018-04
Fabrication of high performance copper-resin lapping plate for sapphire: A combined 2-body and 3-body diamond abrasive wear on sapphire
박진구
2018-04
Characterization of Free-Standing Nano-Membranes by Using Ellipsometry
박진구
2018-10
Removal of EUV exposed hydrocarbon from Ru capping layer of EUV mask using the mixture of alkaline solutions and organic solvents
박진구
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CMP
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SURFACE
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Pellicle
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REDUCTION
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BENZOTRIAZOLE
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Ceria
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CHEMICAL-MECHANICAL PLANARIZATION
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Corrosion
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FILMS
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Fixed abrasive pad
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