Hanyang University repository
menu
검색
Library
Hanyang
Browse
Communities & Collections
Titles
Authors
My Repository
My Account
Receive email updates
Edit Profile
Repository at Hanyang University
Search
All of Repository
COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
Articles
Start a new search
Current filters:
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Add filters:
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Results/Page
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
Sort items by
Relevance
Title
Issue Date
In order
Ascending
Descending
Authors/record
All
1
5
10
15
20
25
30
35
40
45
50
Results 1-5 of 5 (Search time: 0.001 seconds).
Item hits:
Issue Date
Title
Author(s)
2004-05
Aerial image characterization for the defects in the extreme ultraviolet mask
오혜근
2005-03
Line width variation with absorber thickness in extreme ultraviolet lithography
오혜근
2008-02
The study of attenuated PSM structure for extreme ultra violet lithography with minimized mask shadowing effect(
오혜근
2002-10
Bulk Image Formation of Scalar Modeling in a Photoresist
오혜근
2003-02
Prediction of the Critical Dimensions by Using a Threshold Energy Resist Model
오혜근
previous
1
next
Discover
-Subject
2
EUV lithography
1
248 nm
1
Acid distribution
1
Attenuated PSM
1
Bulk image
1
CAR
1
Defocus model
1
EUV mask
1
EUVL
1
Horizontal-vertical CD bias
next >
-Date issued
1
2008
1
2005
1
2004
1
2003
1
2002
BROWSE
Communities & Collections
Titles
Authors