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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
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Issue Date
Title
Author(s)
2007-08
Development of Calibration-Free Imaging Ellipsometry Using Dual-Rotation of Polarizer and Analyzer
오혜근
2005-10
Rubbed Polyimide Layers Studied by Rotating Sample and Compensator Spectroscopic Ellipsometry
오혜근
2008-08
Ellipsometry for Pellicle-Covered Surface
정희준
2008-08
Ellipsometry for Pellicle-Covered Surface
오혜근
2006-06
Mask haze measurement by spectroscopic ellipsometry
오혜근
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오혜근
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haze
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lithography
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pellicle
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photomask
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SCATTEROMETRY
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calibration
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compensator
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contamination
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dual-rotation
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2005
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