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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
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Results 1-3 of 3 (Search time: 0.001 seconds).
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Issue Date
Title
Author(s)
2005-06
ArF photoresist parameter optimization for mask error enhancement factor reduction
오혜근
2005-10
Mask Error Enhancement Factor Variation with Pattern Density
오혜근
2005-10
ArF photoresist parameter optimization for mask error enhancement factor reduction
오혜근
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오혜근
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ArF
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Diffusion length
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Mask Uniformity
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mask uniformity
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Optical Parameter
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optical parameter
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Pattern density
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Photoresist
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photoresist
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3
2005
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