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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
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2003-12
복합적인 레지스트 패턴 붕괴현상의 역학적 해석
오혜근
2003-12
거친 표면을 가진 흡수체와 버퍼의 측면에 의한 극자외선 산란효과
오혜근
2003-12
Ellipsometry 에서의 calibration 및 입사면 고정형 ellipsometer
오혜근
2003-03
Optical Properties of the SiO-Co Composite Thin Films
오혜근
2003-12
Muller matrix ellipsometry 제작 및 응용
오혜근
2003-12
Ellipsometry 에서의 calibration 및 입사면 고정형 ellipsometer
오혜근
2003-12
Aerial image prediction for mask defect in extreme ultraviolet lithography
오혜근
2003-06
Threshold energy resist model for critical dimension prediction
오혜근
2003-06
Resist Pattern Collapse with Top Rounding Resist Profile
오혜근
2003-02
Use of Rotating Compensator Spectroscopic Ellipsometry for Monitoring the Photoresist Etching on Si Wafer
오혜근
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Simulation
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ellipsometry
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248 nm
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Aerial image
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aerial image
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