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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)
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Results 1-5 of 5 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2016-10
Investigation of cu-BTA complex formation during Cu chemical mechanical planarization process
박진구
2013-12
Scratch formation and its mechanism in chemical mechanical planarization (CMP)
박진구
2007-10
Development of post Ru CMP cleaning solutions
박진구
2006-12
연마제 특성에 따른 차세대 금속배선용 Al CMP (chemical mechanical planarization) 슬러리 평가
박진구
2004-06
The Effects of Mechanical Properties of Polishing Pads on Oxide CMP(Chemical Mechanical Planarization)
박진구
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Acidic colloidal slurry
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Al (aluminum)
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Corrosion inhibition
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Cu-BTA complex
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defect source
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defects
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elastic modulus
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Electrical equivalent circuit mod...
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Electrochemical impedance spectro...
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groove pattern
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2010 - 2016
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2004 - 2009
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