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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)
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Results 51-60 of 264 (Search time: 0.004 seconds).
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2001-11
PECVD와 ICP에 의해 증착된 불화유기박막의 나노트라이볼러지 특성 비교분실
박진구
2001-11
Physical and Chemical Characterization of Recycled Oxide CMP Slurry
박진구
2001-11
Cu CMP에서 첨가제가 Polishing에 미치는 영향
박진구
2001-11
Particle Removal and Its Mechanism on Hydrophobic Silicon Wafer in Highly Diluted NH4OH Solutions with an Added Surfactant
박진구
2003-04
Physical and Chemical Characteristics of the Ceramic Conditioner in Chemical Mechanical Planarization
박진구
2002-11
Surface Modification of Micromolds by Fluorocarbon Films
박진구
2002-11
Point of Use Regeneration of Oxide Chemical Mechanical Planarization Slurry by Filterations
박진구
2021-09
Effects of H2O2 and pH on the Chemical Mechanical Planarization of Molybdenum
박진구
2017-10
Influence of a wrinkle in terms of critical dimension variation caused by transmission nonuniformity and a particle defect on extreme ultraviolet pellicle
박진구
2017-01
Self-assembled monolayer modified MoO3/Au/MoO3 multilayer anodes for high performance OLEDs
박진구
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CMP
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Particle removal
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Post CMP cleaning
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Cu CMP
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Megasonic cleaning
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Removal rate
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AFM
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Benzotriazole
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2020 - 2023
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