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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)
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Results 1-6 of 6 (Search time: 0.001 seconds).
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Issue Date
Title
Author(s)
2005-07
Polishing Behavior and Characterization of Cu Surface in Citric Acid based Slurry with Corrosion Inhibitor(BTA)
박진구
2004-07
In-Situ Characterization of Electrochemical and Frictional Behaviors During Copper CMP
박진구
2004-07
Cu CMP에서 Large sized particles이 연마속도에 미치는 영향
박진구
2017-00
Evaluation of competitive reaction of various cu CMP slurry components
박진구
2005-07
부식방지제(BTA)가 첨가된 Cu CMP 슬러리에서의 연마거동과
박진구
2008-12
Adhesion and Removal of Silica and Ceria Particles on the Wafer Surfaces in STI and Poly Si CMP
박진구
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BTA
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Benzotriazole
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Adhesion Force
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AFM
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Alumina Particle
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Citric Acid
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corrosion potential and current
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Cu corrosion inhibition
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Electrochemical Impedance Spectro...
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Frction Force
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