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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)
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Results 1-4 of 4 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2005-07
Polishing Behavior and Characterization of Cu Surface in Citric Acid based Slurry with Corrosion Inhibitor(BTA)
박진구
2022-06
Theoretical validation of inhibition mechanisms of benzotriazole with copper and cobalt for CMP and post-CMP cleaning applications
박진구
2014-06
Characterization of non-amine-based post-copper chemical mechanical planarization cleaning solution
박진구
2005-07
부식방지제(BTA)가 첨가된 Cu CMP 슬러리에서의 연마거동과
박진구
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BTA
2
Cu CMP
1
Cesium hydroxide
1
Cobalt
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Computational calculation
1
Copper
1
Corrosion inhibitor
1
Ethylene glycol
1
Non-amine cleaning solution
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Post-Cu-CMP
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-Date issued
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2020 - 2022
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2010 - 2019
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2005 - 2009
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