Mode transition of power dissipation and plasma parameters in an asymmetric capacitive discharge

Abstract

Electrical characteristics and plasma parameters were experimentally investigated in asymmetric capacitively coupled plasma with various argon gas pressures. At a low discharge current region, the transferred power to the plasma was proportional to the current, while the transferred power increased proportionally to square of the current at a high discharge current region. The mode transition of power dissipation occurred at the lower discharge current region with the high gas pressure. At the low radio-frequency power or low discharge current, the plasma density increased linearly with the discharge current, while at the high power or high discharge current, the rate of an increase in the plasma density depended on the gas pressures. A transition of the discharge resistance was also found when the mode transition of the power dissipation occurred. These changes in the electrical characteristics and the plasma parameters were mainly caused by the power dissipation mode transition from the plasma bulk to the sheath in the capacitive discharge with the asymmetric electrode, which has extremely high self-bias voltages. (C) 2013 Elsevier B.V. All rights reserved.