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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
ARCHITECTURE(건축학부)
BIONANO ENGINEERING(생명나노공학과)
CENTER FOR INNOVATION OF ENGINEERING EDUCATION(공학교육혁신센터)
CIVIL AND ENVIRONMENTAL ENGINEERING(건설환경공학과)
COMPUTER SCIENCE AND ENGINEERING(컴퓨터공학과)
ELECTRICAL ENGINEERING(전자공학부)
ELECTRONIC SYSTEMS ENGINEERING(전자시스템공학과)
INDUSTRIAL AND MANAGEMENT ENGINEERING(산업경영공학과)
INTEGRATIVE ENGINEERING(융합공학과)
MATERIALS ENGINEERING(재료공학과)
MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)
MECHANICAL ENGINEERING(기계공학과)
MILITARY INFORMATION ENGINEERING(국방정보공학과)
ROBOT ENGINEERING(로봇공학과)
TRANSPORTATION AND LOGISTICS ENGINEERING(교통·물류공학과)
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Results 1-4 of 4 (Search time: 0.002 seconds).
Item hits:
Issue Date
Title
Author(s)
2004-02
A 3D Numerical Study of the Polishing Behavior during an Oxide Chemical Mechanical Planarization Process
이도형
2004-02
A 3D Numerical Study of the Polishing Behavior during an Oxide Chemical Mechanical Planarization Process
박진구
2004-11
Slurry에 첨가되는 pH 적정제가 Cu CMP에 미치는 영향 분석
박진구
2004-07
CMP 공정중 전기화학적 방법과 마찰력을 이용하여 Cu Wafer와 Disc의 특성 비교
박진구
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박진구
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이도형
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FVM
2
Incompressible Navier-Stokes Equa...
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Pad
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CFD
1
Chemical-Mechanical Planarization
1
Chemical-Mechanical Planarization...
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Computational Fluid Dynamics
1
Computational Fluid Dynamics (CFD)
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Cu disc
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Cu wafer
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