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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
ARCHITECTURE(건축학부)
BIONANO ENGINEERING(생명나노공학과)
CENTER FOR INNOVATION OF ENGINEERING EDUCATION(공학교육혁신센터)
CIVIL AND ENVIRONMENTAL ENGINEERING(건설환경공학과)
COMPUTER SCIENCE AND ENGINEERING(컴퓨터공학과)
ELECTRICAL ENGINEERING(전자공학부)
ELECTRONIC SYSTEMS ENGINEERING(전자시스템공학과)
INDUSTRIAL AND MANAGEMENT ENGINEERING(산업경영공학과)
INTEGRATIVE ENGINEERING(융합공학과)
MATERIALS ENGINEERING(재료공학과)
MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)
MECHANICAL ENGINEERING(기계공학과)
MILITARY INFORMATION ENGINEERING(국방정보공학과)
ROBOT ENGINEERING(로봇공학과)
TRANSPORTATION AND LOGISTICS ENGINEERING(교통·물류공학과)
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Results 41-50 of 109 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2015-00
Effect of particle contamination on extreme ultraviolet (EUV) mask and megasonic cleaning process for its removal
박진구
2015-00
Effect of FOUP atmosphere control on process wafer integrity in sub20 nm device fabrication
박진구
2015-00
Characterization of Cu-BTA organic complexes on Cu during Cu CMP and post Cu cleaning
박진구
2015-00
Submicron particle removal during FPD oxide TFT process
박진구
2014-11
Investigation of Cu-BTA complex formation and removal on various Cu surface conditions
박진구
2014-11
The effect of fluid pH for 2-body lapping process
박진구
2014-11
Effects of pump-induced particle agglomeration during chemical mechanical planarization (CMP)
박진구
2012-03
텅스텐 화학적-기계적 연마 공정에서 부식방지막이 증착된 금속 컨디셔너 표면의 전기화학적 특성평가
박진구
2012-03
Fabrication of a hydrophobic/hydrophilic hybrid-patterned microarray chip and its application to a cancer marker immunoassay
박진구
2012-02
Fabrication of Large-Area CoNi Mold for Nanoimprint Lithography
박진구
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CMP
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Fixed abrasive pad
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Megasonic cleaning
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Pellicle
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Ceria
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Diamond
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Lapping
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Pad debris
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Chemical mechanical planarization...
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