Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 정진욱 | - |
dc.date.accessioned | 2018-03-24T07:33:40Z | - |
dc.date.available | 2018-03-24T07:33:40Z | - |
dc.date.issued | 2011-11 | - |
dc.identifier.citation | IEEE Transactions On Plasma Science, 2011, 39(11), P.2536-2537 | en_US |
dc.identifier.issn | 1939-9375 | - |
dc.identifier.issn | 0093-3813 | - |
dc.identifier.uri | http://www.ndsl.kr/ndsl/search/detail/article/articleSearchResultDetail.do?cn=NART66006516 | - |
dc.identifier.uri | http://hdl.handle.net/20.500.11754/51886 | - |
dc.description.abstract | Inductively coupled plasmas have two operational modes, i.e., capacitive (E) and inductive (H). In this paper, a 2-D plasma density profile was measured with gas pressures during the E-H heating-mode transition. When the discharge is transited from the E mode to the H mode, the 2-D plasma density profile was not changed at a low gas pressure, whereas the evolution of the 2-D plasma density profile was observed at a high gas pressure. These different changes with the gas pressures on the E-H heating-mode transition originated from the transition of the electron kinetics from the nonlocal kinetics to the local kinetics. | en_US |
dc.description.sponsorship | This work was supported in part by the Science Research Center (SRC) program under Grant 2010-0029418 and in part by the Basic Science Research Program under Grant 2010-0015866 of the National Research Foundation of Korea, funded by the Korean Ministry of Education, Science, and Technology. | en_US |
dc.language.iso | en | en_US |
dc.publisher | IEEE | en_US |
dc.subject | Plasma density | en_US |
dc.subject | Heating | en_US |
dc.subject | Coils | en_US |
dc.subject | Kinetic theory | en_US |
dc.subject | Plasma measurements | en_US |
dc.subject | Discharges | en_US |
dc.title | Evolution of Two-Dimensional Plasma Density on the E-H Heating-Mode Transition in Planar-Type Inductively Coupled Plasma | en_US |
dc.type | Article | en_US |
dc.relation.volume | 39 | - |
dc.identifier.doi | 10.1109/TPS.2011.2135382 | - |
dc.relation.page | 2536-2537 | - |
dc.relation.journal | IEEE TRANSACTIONS ON PLASMA SCIENCE | - |
dc.contributor.googleauthor | Lee, Hyo-Chang | - |
dc.contributor.googleauthor | Kim, Young-Cheol | - |
dc.contributor.googleauthor | Chung, Chin-Wook | - |
dc.contributor.googleauthor | 이효창 | - |
dc.contributor.googleauthor | 김영철 | - |
dc.contributor.googleauthor | 정진욱 | - |
dc.relation.code | 2011203887 | - |
dc.sector.campus | S | - |
dc.sector.daehak | COLLEGE OF ENGINEERING[S] | - |
dc.sector.department | DIVISION OF ELECTRICAL AND BIOMEDICAL ENGINEERING | - |
dc.identifier.pid | joykang | - |
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