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COLLEGE OF ENGINEERING[S](공과대학)
ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부)
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Results 1-6 of 6 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2013-10
Effect of antenna size on electron kinetics in inductively coupled plasmas
정진욱
2013-08
Plasma diagnostic method using intermodulation frequencies in a Langmuir probe
정진욱
2015-04
Relationship between the discharge mode and the spatial oxygen plasma distribution in a large size ferrite inductively coupled plasmas
정진욱
2015-06
Pulsed plasma measurement method using harmonic analysis
정진욱
2015-07
Experimental investigation on plasma parameter profiles on a wafer level with reactor gap lengths in an inductively coupled plasma
정진욱
2011-01
Measurements of the total energy lost per electron-ion pair lost in low-pressure inductive argon, helium, oxygen and nitrogen discharge
정진욱
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-Subject
2
DEPOSITION
2
ELECTRON-TEMPERATURE
2
GLOW-DISCHARGE
1
ANTENNA
1
Antennas
1
AR
1
ARGON DISCHARGE
1
Coils
1
COUPLED PLASMA SOURCE
1
DAMAGE
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-Date issued
3
2015
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2013
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2011
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