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COLLEGE OF ENGINEERING[S](공과대학)
ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부)
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2012-04
유도 결합 플라즈마에서 플라즈마 변수와 전자 에너지 분포에 대한 극판 전력 인가의 영향
정진욱
2013-10
Effect of antenna size on electron kinetics in inductively coupled plasmas
정진욱
2014-01
Method for the measurement of transferred power to plasma in inductive discharges (vol 547, pg 9, 2013)
정진욱
2011-04
E-H mode transition in inductively coupled plasma using Ar, O-2, N-2, and mixture gas
정진욱
2013-01
Real time feedback control of plasma density using a floating probe in semiconductor processing
정진욱
2015-07
Measurements of the spatially resolved electron temperature and plasma potential in ferrite-core side type Ar/He inductively-coupled plasmas
정진욱
2013-06
Method for measurement of transferred power to plasma in inductive discharges
정진욱
2012-12
Comparisons of the electrical characteristics by impedance matching conditions on the E-H and H-E transition and the hysteresis of inductively coupled plasma
정진욱
2011-04
Harmonic analysis of sideband signals generated in plasmas
정진욱
2020-03
Hysteresis and current reduction during E–H mode transition in an inductively coupled plasma
정진욱
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Dissipated power in system
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E-H mode transition
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Electron energy distribution
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Power transfer efficiency
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Antennas
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Capacitive coupling
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Capacitive mode
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