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COLLEGE OF ENGINEERING[S](공과대학)
MATERIALS SCIENCE AND ENGINEERING(신소재공학부)
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Results 61-70 of 103 (Search time: 0.003 seconds).
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Issue Date
Title
Author(s)
2015-03
Dimensionally controlled complex 3D sub-micron pattern fabrication by single step dual diffuser lithography (DDL)
안진호
2015-03
The variation of the enhanced PL efficiency of Y2O3:Eu3+ phosphor films with the height to the ZrO2 nanoparticle-assisted 2D PCL by reverse nano-imprint lithography
안진호
2015-07
Roughening of Polyimide Surface for Inkjet Printing by Plasma Etching Using the Polyimide Masked with Polystyrene Nanosphere Array
안진호
2015-07
Lattice Distortion in In3SbTe2 Phase Change Material with Substitutional Bi
안진호
2015-08
Lattice Distortion in In3SbTe2 Phase Change Material with Substitutional Bi (vol 5, 12867, 2015)
안진호
2015-09
Resistive Switching Characteristics of Atomic-Layer-Deposited Y2O3 Insulators with Deposition Temperature
안진호
2015-09
SRAF를 적용한 극자외선 노광기술용 위상 변위 마스크의 반사도에 따른 이미징 특성 연구
안진호
2015-09
HF 습식 식각을 이용한 극자외선 노광 기술용 SiNx 펠리클 제작 공정
안진호
2015-11
Evaluation of Metal Absorber Materials for Beyond Extreme Ultraviolet Lithography
안진호
2016-07
그림자 효과 완화 및 내화학성 향상을 위한 탄탈륨-니켈 화합물 극자외선 흡수체
안진호
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-Subject
7
EUVL
5
EUV pellicle
5
FILMS
4
Atomic layer deposition
4
atomic layer deposition
4
EUV
4
EUV lithography
4
Pellicle
3
ANGLE
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Core-shell
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-Date issued
15
2020 - 2022
88
2011 - 2019
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