The variation of the enhanced PL efficiency of Y2O3:Eu3+ phosphor films with the height to the ZrO2 nanoparticle-assisted 2D PCL by reverse nano-imprint lithography

Title
The variation of the enhanced PL efficiency of Y2O3:Eu3+ phosphor films with the height to the ZrO2 nanoparticle-assisted 2D PCL by reverse nano-imprint lithography
Author
안진호
Keywords
Reverse nano-imprint; ZrO2 nanoparticle; TPT/PDMS stamp; Photonic crystal; Phosphor film
Issue Date
2015-03
Publisher
ELSEVIER SCIENCE BV
Citation
MICROELECTRONIC ENGINEERING, v. 136, Page. 48-50
Abstract
We developed a zirconium oxide (ZrO2) nanoparticle-assisted photonic structure for improving the light extraction efficiency of Y2O3:Eu3+ phosphor films by reverse nano-imprint lithography approach. The structural effect of a two-dimensional (2D) ZrO2 nanoparticle photonic crystal (PC) pattern on the extraction efficiency of photoluminescence (PL) from the underlying Y2O3:Eu3+ phosphor film was investigated. The 2D photonic crystal structure was fabricated using a reverse nano-imprint process with a ZrO2 nanoparticle solution as a nano-imprint resin and a patterned trimethylolpropane propoxylate triacrylate (TPT)/polydimethylsiloxane (PDMS) stamp as a mold. We controlled height of ZrO2 nanoparticle patterns in the range 190-370 nm by varying the height of master mold. This simple process results in 6.9 times improvement of extraction efficiency for a 2D ZrO2 nanoparticle-assisted photonic crystal pattern (h = similar to 370 nm) compared to the conventional Y2O3:Eu3+ thin-film phosphors. (C) 2015 Elsevier B.V. All rights reserved.
URI
http://www.sciencedirect.com/science/article/pii/S0167931715001483http://hdl.handle.net/20.500.11754/22722
ISSN
0167-9317; 1873-5568
DOI
10.1016/j.mee.2015.03.035
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > MATERIALS SCIENCE AND ENGINEERING(신소재공학부) > Articles
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