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COLLEGE OF ENGINEERING[S](공과대학)
MATERIALS SCIENCE AND ENGINEERING(신소재공학부)
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Results 101-103 of 103 (Search time: 0.003 seconds).
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2020-03
Enhanced resistive switching characteristics of HfOx insulator fabricated by atomic layer deposition and La(NO3)(3)center dot 6H(2)O solution as catalytic oxidant
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2020-07
A comprehensive study on the effect of tin top and bottom electrodes on atomic layer deposited ferroelectric Hf˂inf˃0.5˂/inf˃Zr˂inf˃0.5˂/inf˃O˂inf˃2˂/inf˃ thin films
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2020-07
Low Temperature Thermal Atomic Layer Deposition of Aluminum Nitride Using Hydrazine as the Nitrogen Source
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EUVL
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EUV pellicle
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FILMS
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Atomic layer deposition
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atomic layer deposition
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EUV
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EUV lithography
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2020 - 2022
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2011 - 2019
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